A linear motor stage capable of ultra-low speed motion in sub-micron application.
It is compatible to the piezo stage which need the positioning, low ripple, low constant speed and high rigidity.
Please contact us for customized service.
Low constant speed without cogging and high rigidity.
It is suitable for the application in low or non axial force machining and inspection for microscope scanning(Optical Stage), precision processing, laser processing, biological engineering equipment, etc.
| SCR-075-050 | SCR-075-100 | SCR-075-150 | ||
| Stroke | mm | 50 | 100 | 150 |
| Total length | mm | 140 | 190 | 240 |
| Encoder resolution | μm | 1､ 0.5､ 0.1､0.05､ 0.01､0.005 | ||
| Repeatability | COUNT | ±1 | ||
| Max. acceleration | m/s2 | 25 | 20 | 15 |
| Max. velocity | m/s | 1.1 | 1.4 | 1.5 |
| Load capacity*1 | kg | 45.5 | ||
| Moving mass | kg | 0.55 | 0.7 | 0.93 |
| Total mass | kg | 1.0 | 1.3 | 1.7 |
| Straightness & Flatness*2 | μm | 2/25mm | ||
| Home / Limited sensor | Non-Contact Reed Switch | |||
| Home sensor location | Center | |||
| Motor Part Number | S080Q | |||
*1: The max. load capacity, please contact NPAT to check the moving condition.
*2: Max. tolerance (um) / per each 25mm
